Laboratory for thin film deposition - Research facilities - Applied physics and didactic physics - Department of Physics
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18 Oct 2016
Laboratory for thin film deposition
Laboratory for thin film deposition
Photo01_Mantis MBE
Laboratory for thin film deposition
Deposition of materials from the vapour phase allows variation of their structural and chemical properties, allowing the production of materials with novel optical properties.
Our facility is centred around a Mantis Deposition Ltd. Molecular Beam Epitaxy (MBE) system, which has Knudsen sources for deposition of II-VI semiconductors, e-beam sources for the addition of transition metal dopants, and atom sources for supplying gas dopants without the disruptive effect of ion bombardment. Additional vacuum systems permit thermal evaporation, ion-assisted deposition, sputtering and Matrix-Assisted Pulsed Laser Evaporation (MAPLE).