RTP - Equipment - NanoLab
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Rapid thermal process (RTP) oven
Rapid thermal process (RTP) oven
JetFirst 200 Processor, ST Systems
General information:
The furnace has a stainless steel chamber suitable for rapid heating of thin films under controlled atmosphere or vacuum. It is suitable for processing up to 200 mm wafers, as well as powders and non-conductive materials in a temperature range up to 1200°C.