Course - Micro- and nanofabrication - TFE4167
TFE4167 - Micro- and nanofabrication
About
Examination arrangement
Examination arrangement: School exam
Grade: Letter grades
| Evaluation | Weighting | Duration | Grade deviation | Examination aids |
|---|---|---|---|---|
| School exam | 100/100 | 4 hours | C |
Course content
This course provides an introduction to micro- and nanofabrication, including silicon technology for fabrication of sensors and actuators. Selected semiconductor manufacturing processes in clean room, such as photolithography, etch and metallization are highlighted. Basic mechanics for design of microelectromechanical systems (MEMS) is presented, together with different principles for sensors and actuators based on piezoresistivity, electrostatics, capacitance and thermal effects. Design and fabrication of different physical sensors, such as pressure sensors and accelerometers, are given in detail.
Learning outcome
Knowledge: The candidate has: - detailed knowledge on selected topics within fabrication technology for semiconductor devices and integrated circuits, as well as the different fabrication processes for manufacturing of MEMS - knowledge on the basic properties and applications of microsystem technology - knowledge on the general characteristics of sensors and actuators - detailed knowledge on the functional principles and structure of various types of micro-electro-mechanical sensors and actuators - knowledge on the key aspects, trade-offs and basic principles of design and optimization of MEMS. Technical skills: The candidate can: - do photolithography and simple processing of semiconductors in clean room, and do characterization with selected techniques - propose suitable sensor or actuation principles to achieve a particular function - select the optimal sensor or actuator design - carry out simple calculations of electro-mechanical properties of micro-electro-mechanical components - propose a suitable process for the fabrication of specific micro-electro-mechanical components. General expertise: The candidate has: - the required knowledge for more advanced studies on the fabrication technology and principles of operation of advanced semiconductor devices, electronic circuits and systems. - the required knowledge to discuss micro system technology in the context of important trends within information technology.
Learning methods and activities
Auditorium lectures and exercises (problems), and laboratory excercises in clean room and characterization lab.
Compulsory assignments
- Exercises
- Lab exercises
Further on evaluation
The written exam will be given in English only. If there is a re-sit examination in August, the examination form may be changed from written to oral.
Specific conditions
Admission to a programme of study is required:
Electronic Systems Design (MSELSYS)
Electronics System Design and Innovation (MTELSYS)
Nanotechnology (MTNANO)
Recommended previous knowledge
TFE4146 Semiconductor Devices or similar. TFY4220 Solid State Physics or similar. TMT4110 General Chemistry or similar. TMT4185 Materials Science and Engineering or similar.
Course materials
To be announced at course start.
Credit reductions
| Course code | Reduction | From | To |
|---|---|---|---|
| TFE4180 | 3.7 | AUTUMN 2018 | |
| TFE4177 | 3.7 | AUTUMN 2018 | |
| TFE4225 | 3.7 | AUTUMN 2018 | |
| TFE4162 | 3.7 | AUTUMN 2018 | |
| FE8130 | 3.7 | AUTUMN 2018 | |
| TFE4168 | 3.7 | AUTUMN 2019 |
No
Version: 1
Credits:
7.5 SP
Study level: Second degree level
Term no.: 1
Teaching semester: SPRING 2025
Language of instruction: English
Location: Trondheim
- Electronics
- Electronics and Telecommunications
- Materials Technology and Electrochemistry
- Materials Science and Solid State Physics
- Solid State Physics
- Physical Electronics
- Technological subjects
Department with academic responsibility
Department of Electronic Systems
Examination
Examination arrangement: School exam
- Term Status code Evaluation Weighting Examination aids Date Time Examination system Room *
- Spring ORD School exam 100/100 C INSPERA
-
Room Building Number of candidates - Summer UTS School exam 100/100 C INSPERA
-
Room Building Number of candidates
- * The location (room) for a written examination is published 3 days before examination date. If more than one room is listed, you will find your room at Studentweb.
For more information regarding registration for examination and examination procedures, see "Innsida - Exams"